76527 Introduction to Microsystem Technology

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Institute of Automation and Control

Micro- and Nanosystems Research Group

Schedule

Lectures will be given on Wednesdays at 14.15 in SD302.

A preliminary lecture schedule:

Week

Topic 

Hours

Lecturer

36

Course outline and introduction to MST

2 h

Pasi Kallio

37

Applications of MST: overview, telecom, process industry, consumer products...

1 h

Pasi Kallio

Applications of MST: medical

1 h

Pekka Ronkanen

38

Applications of MST: automotive

1 h

Ari Hakala

Applications of MST: bio

1 h

Johana Kuncova
Visiting MST lab at ACI    

39

Microfabrication technologies: silicon processing

1 h

Pasi Kallio

Microfabrication technologies : LIGA, MIM, hot embossing

1 h

Johana Kuncova

40

Microfabrication technologies: other methods,

1 h

Johana Kuncova

Microfabrication technologies: bonding, packaging

1 h

41

Microphysics

Scaling

Trimmer's notation

2 h

Mariaana Savia

42

Instructions for writing a seminar report

1 h

Matti Vilkko

Instructions for giving a seminar presentation 1 h Johana Kuncova
Seminar work (topics and instructions)   Pasi Kallio

43

No lectures (vacation)

 

 

44

Active materials and microactuators I

2 h

Pasi Kallio, Pekka Ronkanen

45

Microactuators II

1 h

Pasi Kallio

Microsensors I 1 h Mariaana Savia

46

Microsensors II 2 h Mariaana Savia

47

Microfluidics

2 h

Johana Kuncova

48

Micro optics

1 h

Jyrki Saarinen, Heptagon Oy

Capacitive silicon accelerometers 1 h Ulf Meriheinä, VTI Technologies

49

Microrobotics and micromanipulation

2 h

Pasi Kallio

50

Seminars

 

Students

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